Time-dependent buckling phenomena of polysilicon micro beams
نویسندگان
چکیده
منابع مشابه
Analysis of polysilicon micro beams buckling with temperature-dependent properties
The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of suspended polysilicon micro beams, the thermo-mechanical properties of polysilicon have been considered constant over a wide rang of temperature (20900°C). In reality, the thermo-mechanical properties of polysilicon depe...
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Functionally graded materials, as a branch of new materials, have attracted increasing attention in recent years. A survey in the literature reveals the existence of wealth investigations on analysis of functionally graded material beams. Among them, Kang and Lee [1] presented explicit expressions for deflection and rotation of an FGM cantilever beam subjected to an end moment. Considering the ...
متن کاملPii: S0026-2692(99)00081-6
Time-dependent buckling phenomena of polysilicon micro beams have been demonstrated and reported. These beams are suspended 2 mm above the silicon substrate with dimensions of 100 mm (length) × 2 mm (width) × 2 mm (thickness). When a constant input current is supplied at or above a threshold value, electro-thermally induced buckling occurs. It is observed and recorded that the beams exhibit tim...
متن کاملMaterial Property Measurements of Micromechanical Polysilicon Beams
Fabricationand measurement-induced stresses in surface micromachined structures are investigated by wafer-level probing of electrostatically actuated polysilicon test structures fabricated by the MUMPs process of MCNC. The test structures are based on M-Test, an electrostatic pull-in approach for monitoring process uniformity and reproducibility, and, when used in conjunction with suitable geom...
متن کاملThermal Buckling Analysis of Functionally Graded Euler-Bernoulli Beams with Temperature-dependent Properties
Thermal buckling behavior of functionally graded Euler-Bernoulli beams in thermal conditions is investigated analytically. The beam with material and thermal properties dependent on the temperature and position is considered. Based on the transformed-section method, the functionally graded beam is considered as an equivalent homogeneous Euler-Bernoulli beam with an effective bending rigidity un...
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ژورنال
عنوان ژورنال: Microelectronics Journal
سال: 1999
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(99)00081-6